Proceedings Paper
Characterization of surface relief gratings of submicron period| Format | Member Price | Non-Member Price |
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Paper Abstract
This paper deals with optical characterization of photo-polymer gratings for parameter control. The gratings were
obtained using the photoinduced single step inscription of refractive optical elements technique. The optical
characterization was done by measuring the specular and diffracted orders of a laser beam incident on the grating. This
technique is specifically known as scatterometry. The laser was a He-Ne with 633 nm wavelength. The measured
diffraction efficiencies contain information about the parameters to be determined of the grating, such as pitch, linewidth
and shape of the ridges.
Paper Details
Date Published: 1 August 2007
PDF: 9 pages
Proc. SPIE 6785, ROMOPTO 2006: Eighth Conference on Optics, 67851V (1 August 2007); doi: 10.1117/12.756800
Published in SPIE Proceedings Vol. 6785:
ROMOPTO 2006: Eighth Conference on Optics
Valentin I. Vlad, Editor(s)
PDF: 9 pages
Proc. SPIE 6785, ROMOPTO 2006: Eighth Conference on Optics, 67851V (1 August 2007); doi: 10.1117/12.756800
Show Author Affiliations
P. C. Logofătu, National Institute for Lasers, Plasma and Radiation Physics (Romania)
D. Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Marie-Claude Castex, Lab. de Physique des Lasers, Univ. Paris-Nord (France)
Ileana Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
D. Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Marie-Claude Castex, Lab. de Physique des Lasers, Univ. Paris-Nord (France)
Ileana Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
V. Damian, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Iuliana Iordache, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Raluca Müller, National Institute in Microtechnologies (Romania)
Iuliana Iordache, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Raluca Müller, National Institute in Microtechnologies (Romania)
Published in SPIE Proceedings Vol. 6785:
ROMOPTO 2006: Eighth Conference on Optics
Valentin I. Vlad, Editor(s)
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