Phase shifter is one of the core components for phased-array antennas which find wide applications in satellite systems, telecommunications, wireless systems, radar systems and tracking systems. The current high-frequency phase shifters are mainly built upon active semiconductor technologies which suffer from high fabrication and assembly costs. In this work, we propose a cost-effective approach to fabricate distributed MEMS transmission line phase shifters on a polymer-glass substrate. The fabrication procedure is compatible with CMOS and post-CMOS processes. The polymerglass phase shifter was characterized from DC to 26 GHz. The measurements show a phase shift of 120° and a 2.5-dB insertion loss at 26 GHz.

Date Published: 4 January 2008
PDF: 7 pages
Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360I (4 January 2008); doi: 10.1117/12.754991

Published in SPIE Proceedings Vol. 6836:
MEMS/MOEMS Technologies and Applications III
Jung-Chih Chiao; Xuyuan Chen; Zhaoying Zhou; Xinxin Li, Editor(s)