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Proceedings Paper

Nano-glass imprinting technology for next-generation optical devices
Author(s): Junji Nishii
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Paper Abstract

Sub-wavelength periodic structures are very attractive for several optical elements with functions such as polarization-independent diffraction, isolation, antireflection, and phase control. In this paper I will review the fabrication of one- and two-dimensional periodic structures upon the surface of oxide glasses using lithograph, etching and glass imprinting. A 4-channel demultiplexer and a superprism demultiplexer were fabricated upon silica plates. The latter exhibited a precise linear relationship between the wavelength and the change of the output angle, which reached 4.8° with the incident wavelength change of 1% for wavelengths of 1400-1500 nm. Fabrication of surface-relief gratings with high spatial frequencies directly on optical glasses was possible using an imprinting process. One-dimensional and two-dimensional periodic structures were formed reproducibly on a phosphate glass surface using thermally durable molds.

Paper Details

Date Published: 28 November 2007
PDF: 8 pages
Proc. SPIE 6834, Optical Design and Testing III, 683403 (28 November 2007); doi: 10.1117/12.754846
Show Author Affiliations
Junji Nishii, National Institute of Advanced Industrial Science and Technology (Japan)

Published in SPIE Proceedings Vol. 6834:
Optical Design and Testing III
Yongtian Wang; Theo T. Tschudi; Jannick P. Rolland; Kimio Tatsuno, Editor(s)

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