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Proceedings Paper

Soft lithographic fabrication of microresonators
Author(s): Andrea M. Armani; Kerry J. Vahala
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Paper Abstract

As new synthetic, low-loss polymers are developed, polymer optical cavities are experiencing a revolution, in both fabrication design and functionality. Recently a fabrication technique was developed which enabled planar arrays of polymeric resonators to achieve cavity Q factors greater than 1 million. This molding technique can be used to fabricate resonators from polymers which have either thermal or UV curing mechanisms. These resonant cavities demonstrate quality factors which are competitive with photonic crystals and microdisk resonators and have applications in telecommunications and biological sensing.

Paper Details

Date Published: 10 October 2007
PDF: 8 pages
Proc. SPIE 6717, Optomechatronic Micro/Nano Devices and Components III, 671706 (10 October 2007); doi: 10.1117/12.754326
Show Author Affiliations
Andrea M. Armani, California Institute of Technology (United States)
Kerry J. Vahala, California Institute of Technology (United States)

Published in SPIE Proceedings Vol. 6717:
Optomechatronic Micro/Nano Devices and Components III
Lixin Dong; Yoshitada Katagiri; Eiji Higurashi; Hiroshi Toshiyoshi; Yves-Alain Peter, Editor(s)

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