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Proceedings Paper

MEMS tunable silicon Fabry-Perot cavity
Author(s): Jonathan Masson; Fatou Binetou Koné; Yves-Alain Peter
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Paper Abstract

In this paper we present an innovative tunable Fabry-Perot cavity micromachined in silicon. A short summary of the theoretical background of these filters is presented, followed by technical requirements for the design of the dielectric mirror composing the Fabry-Perot cavity and the cavity itself. Simulations and experimental data are demonstrated to be in good agreement. An in plane design is used to allow easy fiber alignment. The Fabry-Perot is tuned by an electrostatic comb drive actuator supported by a set of four springs to achieve a uniform modulation of the air gap of the filter. Only 15.4 V are required to tune the Fabry-Perot over 73nm bandwidth (covering more than the whole C-band) with a FWHM varying from 6 to 10nm. Transmission losses are -11dB.

Paper Details

Date Published: 10 September 2007
PDF: 9 pages
Proc. SPIE 6717, Optomechatronic Micro/Nano Devices and Components III, 671705 (10 September 2007); doi: 10.1117/12.754325
Show Author Affiliations
Jonathan Masson, École Polytechnique de Montréal (Canada)
Fatou Binetou Koné, École Polytechnique de Montréal (Canada)
Yves-Alain Peter, École Polytechnique de Montréal (Canada)

Published in SPIE Proceedings Vol. 6717:
Optomechatronic Micro/Nano Devices and Components III
Lixin Dong; Yoshitada Katagiri; Eiji Higurashi; Hiroshi Toshiyoshi; Yves-Alain Peter, Editor(s)

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