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Proceedings Paper

Optical beam steering using a 2D MEMS scanner
Author(s): Yves Pétremand; Pierre-André Clerc; Marc Epitaux; Ralf Hauffe; Wilfried Noell; N. F. de Rooij
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Paper Abstract

This paper presents the design, fabrication and operation principle of an optical beam steerer for laser fiber coupling based on a MEMS device. The MEMS chip consists on a bi-dimensional movable platform based on uni-dimensional comb drive actuation. An optical lens is assembled onto the mobile platform to focus and steer the light comping from a laser diode and couple it into an optical fiber. Assembly of a complete system and measurements were performed and compared to simulation results. Both the trajectory of the MEMS and resonance frewquency measurements agree with the simulated ones.

Paper Details

Date Published: 10 October 2007
PDF: 9 pages
Proc. SPIE 6715, Optomechatronic Actuators and Manipulation III, 671502 (10 October 2007); doi: 10.1117/12.754170
Show Author Affiliations
Yves Pétremand, Univ. of Neuchâtel (Switzerland)
Pierre-André Clerc, Univ. of Neuchâtel (Switzerland)
Marc Epitaux, Intel Corp. (United States)
Ralf Hauffe, Hymite GmbH (Germany)
Wilfried Noell, Univ. of Neuchâtel (Switzerland)
N. F. de Rooij, Univ. of Neuchâtel (Switzerland)

Published in SPIE Proceedings Vol. 6715:
Optomechatronic Actuators and Manipulation III
Yves Bellouard; Yukitoshi Otani; Kee S. Moon, Editor(s)

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