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Proceedings Paper

Extended lifetime of fluoride optics
Author(s): Jue Wang; Colleen R. Clar; Horst Schreiber
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Paper Abstract

Surface and coating technology plays an important role for extending lifetime of fluoride optics for ArF excimer laser applications. Optically finished CaF2 optics is characterized as top surface and subsurface by means of non-distractive quasi-Brewster angle technique. The subsurface is revealed by removing the top surface via distractive methods. Color centers on plasma ion and laser irradiated CaF2 optics are discussed. The results suggest that fluorine depletion is associated with laser damage, dense smooth coatings enable one to extend the lifetime of CaF2 optics.

Paper Details

Date Published: 20 December 2007
PDF: 9 pages
Proc. SPIE 6720, Laser-Induced Damage in Optical Materials: 2007, 67200I (20 December 2007); doi: 10.1117/12.753045
Show Author Affiliations
Jue Wang, Corning Tropel Corp. (United States)
Colleen R. Clar, Corning Tropel Corp. (United States)
Horst Schreiber, Corning Tropel Corp. (United States)

Published in SPIE Proceedings Vol. 6720:
Laser-Induced Damage in Optical Materials: 2007
Gregory J. Exarhos; Arthur H. Guenther; Keith L. Lewis; Detlev Ristau; M. J. Soileau; Christopher J. Stolz, Editor(s)

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