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Proceedings Paper

A selective control of narrow groove parameters with scanning differential heterodyne microscope
Author(s): D. V. Baranov; E. M. Zolotov
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Paper Abstract

The general idea of the present investigations is to use both TE and TM polarization of electromagnetic wave in high resolution scanning differential heterodyne microscope to get information about width and depth of deep and narrow metalized rectangular grooves. The main application of the method is the characterization of plasmon polariton waveguides. Using rigorous diffraction theory we have demonstrated the difference in periodic depth dependences of phase and amplitude contrast of microscope response for TE and TM polarization of probing beams. We have also proposed a method of depth and width control for grooves in case of a phase inversion of response.

Paper Details

Date Published: 31 July 2007
PDF: 7 pages
Proc. SPIE 6728, ICONO 2007: Novel Photonics Materials; Optics and Optical Diagnostics of Nanostructures, 67281L (31 July 2007); doi: 10.1117/12.752346
Show Author Affiliations
D. V. Baranov, General Physics Institute (Russia)
E. M. Zolotov, General Physics Institute (Russia)

Published in SPIE Proceedings Vol. 6728:
ICONO 2007: Novel Photonics Materials; Optics and Optical Diagnostics of Nanostructures
Oleg Andreevich Aktsipetrov; Sergey V. Gaponenko; Nikolay I. Zheludev; Vladimir M. Shalaev, Editor(s)

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