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Proceedings Paper

Tolerancing and compensation of a Shack-Hartmann wavefront sensor
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Paper Abstract

Phase estimation in a Shack-Hartmann wavefront sensor is susceptible to several sources of error, including spot position noise and induced aberrations. This paper presents an analysis of those errors for a specific instrument as well as an approach to compensation of the induced aberrations. The compensation scheme has its own sources of error, and this paper investigates the associated tolerances. In addition, experimental data is presented for a system that meets the tolerances and performs at the required accuracy.

Paper Details

Date Published: 21 September 2007
PDF: 9 pages
Proc. SPIE 6676, Optical System Alignment and Tolerancing, 667606 (21 September 2007); doi: 10.1117/12.740217
Show Author Affiliations
Daniel G. Smith, Nikon Research Corp. of America (United States)
John E. Greivenkamp, College of Optical Sciences, Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 6676:
Optical System Alignment and Tolerancing
José M. Sasian; Mitchell C. Ruda, Editor(s)

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