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Proceedings Paper

Actuators with 10 mm stroke and less than 300 nm of runout
Author(s): Alson E. Hatheway
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Paper Abstract

All-elastic motorized flexure stages have been developed for critical metrology applications where X-Y runout of the motion must be less than 300 nm over a 10 mm stroke. The design was adapted from a highly stable flat-blade flexure stage that was manually driven and used in several instruments where long term stability of adjustments were important. The adaptations included a motor-driven miniature ball screw, a Z axis position sensor repeatable to 10 microns and elastic strain relief between the ball nut and the driven table. In-situ testing of the actuators demonstrated that they met or exceeded all specifications for their performance.

Paper Details

Date Published: 17 September 2007
PDF: 5 pages
Proc. SPIE 6665, New Developments in Optomechanics, 66650S (17 September 2007); doi: 10.1117/12.740030
Show Author Affiliations
Alson E. Hatheway, Alson E. Hatheway, Inc. (United States)

Published in SPIE Proceedings Vol. 6665:
New Developments in Optomechanics
Alson E. Hatheway, Editor(s)

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