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Proceedings Paper

Nano-precision dynamic motion control
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Paper Abstract

This paper presents digital motion control algorithms, real-time implementation, and experimental results for dynamic motion control. A digital control system that includes robust feedback, previewed feedforward, and repetitive control action is implemented on a piezoelectric actuator driven mechanical stage and is demonstrated to achieve nanometer level dynamic precision.

Paper Details

Date Published: 10 September 2007
PDF: 8 pages
Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480H (10 September 2007); doi: 10.1117/12.738689
Show Author Affiliations
Chi-Ying Lin, Univ. of California, Los Angeles (United States)
Tsu-Chin Tsao, Univ. of California, Los Angeles (United States)

Published in SPIE Proceedings Vol. 6648:
Instrumentation, Metrology, and Standards for Nanomanufacturing
Michael T. Postek; John A. Allgair, Editor(s)

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