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Proceedings Paper

High numerical-aperture microlens fabricated by focused ion beam milling
Author(s): Yi Chiu; Chien-Hsun Huang; Ying-Chien Hsu
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Paper Abstract

The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 μm.

Paper Details

Date Published: 16 July 2007
PDF: 6 pages
Proc. SPIE 6620, Optical Data Storage 2007, 66200L (16 July 2007); doi: 10.1117/12.738639
Show Author Affiliations
Yi Chiu, National Chiao Tung Univ. (Taiwan)
Chien-Hsun Huang, National Chiao Tung Univ. (Taiwan)
Ying-Chien Hsu, National Chiao Tung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 6620:
Optical Data Storage 2007
Bernard Bell; Takeshi Shimano, Editor(s)

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