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Proceedings Paper

Micro-opto-electro-mechanical system (MOEMS) for microstructure manipulation and optical characterization
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Paper Abstract

Microstructure manipulation is a fundamental process to further the study of biology and medicine, as well as to advance micro- and nano-system applications. The manipulation of micro and nanostructures has been achieved through various microgripper devices developed recently, which lead to advances in single cell manipulation and micromachine assembly. However, the physical, mechanical, optical and chemical information about the microstructure under study is usually extracted from macroscopic instrumentation, such as confocal microscopy and Raman spectroscopy. In this paper we describe the design, simulation, fabrication and characterization (mechanical and optical) of a novel Micro-Opto-Electro-Mechanical-System (MOEMS) optical microgripper. This is the first device of this kind, which enables the direct manipulation, mechanical characterization, and simultaneous optical characterization of microstructures. Optical fluorescence measurements or identification, as well as absorption spectroscopy are possible with this new device. The device is implemented in SU-8 due to its suitable optical and mechanical properties. The current generation of the device was designed to manipulate structures with dimensions lower than ~5 μm.

Paper Details

Date Published: 11 September 2007
PDF: 9 pages
Proc. SPIE 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 664525 (11 September 2007); doi: 10.1117/12.734827
Show Author Affiliations
Jose A. Martinez, Florida International Univ. (United States)
Tao Liu, Florida International Univ. (United States)
Roberto R. Panepucci, Florida International Univ. (United States)

Published in SPIE Proceedings Vol. 6645:
Nanoengineering: Fabrication, Properties, Optics, and Devices IV
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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