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Proceedings Paper

Frequency response of the three Gaussian beam interferometric profilometer
Author(s): Lorenzo Juárez P.; J. Mauricio Flores; Moisés Cywiak; Manuel Servín
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Paper Abstract

A novel technique based on the use of a three Gaussian beam interferometer to obtain roughness information about smooth optical surfaces is described. The technique is based on the heterodinization of three coherent optical beams. One of the beams is used as a probe beam after being focused and reflected from the surface under test. A second beam is generated to be reflected by a reference surface. The last beam is obtained from the first diffraction order of a Bragg cell and thus, it is shifted in its temporal frequency. The three beams are coherently added at the sensitive plane of a photodetector that integrates the overall intensity of the beams. It will be demonstrated analytically that the electrical signal at the output of the photodetector is a time varying signal whose amplitude is proportional to the surface's local vertical height. The frequency response of the proposed system is characterized experimentally by measuring the profile of three different blazed-gratings. Once the system is calibrated, we present measurements of the roughness of an optical flat.

Paper Details

Date Published: 18 September 2007
PDF: 8 pages
Proc. SPIE 6671, Optical Manufacturing and Testing VII, 66710E (18 September 2007); doi: 10.1117/12.734142
Show Author Affiliations
Lorenzo Juárez P., Ctr. de Investigaciones en Óptica, A.C. (Mexico)
J. Mauricio Flores, Ctr. de Investigaciones en Óptica, A.C. (Mexico)
Moisés Cywiak, Ctr. de Investigaciones en Óptica, A.C. (Mexico)
Manuel Servín, Ctr. de Investigaciones en Óptica, A.C. (Mexico)

Published in SPIE Proceedings Vol. 6671:
Optical Manufacturing and Testing VII
James H. Burge; Oliver W. Faehnle; Ray Williamson, Editor(s)

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