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Proceedings Paper

Aspheric measurement based on the curvature sensing method
Author(s): YongKwan Kwon; ByoungChang Kim; Duck Hyun Wang; YunWoo Lee; HoSoon Yang; HyugGyo Rhee
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Paper Abstract

We present a method of aspheric surface profile measurement based on the principle of curvature sensor, which measures the curvature of subaperture topography along a line and then reconstructs the entire profile from the measured local curvature data. The subaperture topography is obtained by using white-light scanning interferomtery to avoid the optical alignment error along an optical axis. Test measurement results demonstrate that the proposed method and system is well suited for the aspheric surface profile measurement.

Paper Details

Date Published: 14 September 2007
PDF: 8 pages
Proc. SPIE 6671, Optical Manufacturing and Testing VII, 667119 (14 September 2007); doi: 10.1117/12.734117
Show Author Affiliations
YongKwan Kwon, Kyungnam Univ. (South Korea)
ByoungChang Kim, Kyungnam Univ. (South Korea)
Duck Hyun Wang, Kyungnam Univ. (South Korea)
YunWoo Lee, Korea Research Institute of Standards and Science (South Korea)
HoSoon Yang, Korea Research Institute of Standards and Science (South Korea)
HyugGyo Rhee, Korea Research Institute of Standards and Science (South Korea)

Published in SPIE Proceedings Vol. 6671:
Optical Manufacturing and Testing VII
James H. Burge; Oliver W. Faehnle; Ray Williamson, Editor(s)

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