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Proceedings Paper

Performance of newly developed Mg/SiC multilayer mirrors
Author(s): Takenori Toyota; Go Murakami; Kazuo Yoshioka; Ichiro Yoshikawa
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Paper Abstract

A multilayer coating mirror of Mo/Si is usually used for space science in the spectral range of extreme ultraviolet (EUV), especially for He-II (30.4 nm) radiation, because it is highly stable under vacuum and atmosphere. It has the fairly high reflectivity of 15-20%. However, the space science community needs the coating of higher reflectivity at 30.4 nm radiation for the future satellite missions, especially for the small satellite (to reduce the size of optics). In this work, for developing a new multilayer mirror for He-II radiation, we report the performance of a multilayer consisting of Mg/SiC and the aging in reflectivity under atmosphere and vacuum.

Paper Details

Date Published: 20 September 2007
PDF: 9 pages
Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050V (20 September 2007); doi: 10.1117/12.731422
Show Author Affiliations
Takenori Toyota, The Univ. of Tokyo (Japan)
Go Murakami, The Univ. of Tokyo (Japan)
Kazuo Yoshioka, The Univ. of Tokyo (Japan)
Ichiro Yoshikawa, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 6705:
Advances in X-Ray/EUV Optics and Components II
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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