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Proceedings Paper

A novel low-cost high-throughput probe card scanner analyzer for characterization of magnetic tunnel junctions
Author(s): Philip W. T. Pong; Moshe Schmoueli; Eliezer Marcus; William F. Egelhoff Jr.
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Paper Abstract

The advancement of the technology of magnetic tunnel junctions (MTJs) greatly hinges on the optimization of the magnetic materials, fabrication process, and annealing conditions which involve characterization of a large number of samples. As such, it is of paramount importance to have a rapid-turnaround characterization method since the characterization process can take even longer time than the fabrication. Conventionally, micropositioners and probe tips are manually operated to perform 4-point electrical measurement on each individual device which is a time-consuming, low-throughput process. A commercial automatic probe card analyzer can provide high turnaround; however, it is expensive and involves much cost and labor to install and maintain the equipment. In view of this, we have developed a novel low-cost, home-made, high-throughput probe card analyzer system for characterization of MTJs. It can perform fast 4-probe electrical measurements including current vs voltage, magnetoresistance, and bias dependence measurements with a high turnaround of about 500 devices per hour. The design and construction of the system is discussed in detail in this paper.

Paper Details

Date Published: 10 September 2007
PDF: 12 pages
Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480P (10 September 2007);
Show Author Affiliations
Philip W. T. Pong, National Institute of Standards and Technology (United States)
Moshe Schmoueli, National Institute of Standards and Technology (United States)
Eliezer Marcus, National Institute of Standards and Technology (United States)
William F. Egelhoff Jr., National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 6648:
Instrumentation, Metrology, and Standards for Nanomanufacturing
Michael T. Postek; John A. Allgair, Editor(s)

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