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Proceedings Paper

Excimer laser micromachining
Author(s): Konstantin E. Lapshin; Alexey Z. Obidin; Sergey K. Vartapetov
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Paper Abstract

Wavelength, pulse energy, repetition rate of excimer lasers as well as beam profile and beam delivery system are highly important parameters for precision machining. In this paper we report features of our excimer lasers and excimer laser systems that have been designed for micromachining. The examples of treatment of different materials are presented. In particular, we provide some new results of microstructuring of the surface of fused silica and also formation of up to 10 mm long microchannels with extremely high aspect ratio. We discovered some liquid forming under certain circumstances due to drilling of microchannels in PMMA. This liquid remains unchanged in the microchannels after the treatment.

Paper Details

Date Published: 25 April 2007
PDF: 10 pages
Proc. SPIE 6606, Advanced Laser Technologies 2006, 66060V (25 April 2007); doi: 10.1117/12.729649
Show Author Affiliations
Konstantin E. Lapshin, Physics Instrumentation Ctr. of General Physics Institute (Russia)
Alexey Z. Obidin, Physics Instrumentation Ctr. of General Physics Institute (Russia)
Sergey K. Vartapetov, Physics Instrumentation Ctr. of General Physics Institute (Russia)

Published in SPIE Proceedings Vol. 6606:
Advanced Laser Technologies 2006
Dan C. Dumitras; Maria Dinescu; Vitally I. Konov, Editor(s)

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