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Proceedings Paper

Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements
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Paper Abstract

This paper presents measurements of calibrated step height and pitch standards using a homodyne interferometer-based metrological scanning probe microscope (SPM) and a nanopositioning and nanomeasuring machine (NPM machine). These devices were developed at the Institute of Process Measurement and Sensor Technology of the Technische Universität Ilmenau. Together these devices are capable of highly exact dimensional and traceable long-range positioning and measurement with a resolution of 0.1 nm over the positioning and measurement range of 25 mm × 25 mm × 5 mm. Measurements of different calibrated step height and pitch standards were completed in order to test the repeatability and accuracy of the metrological SPM. The deviations between the calibrated and measured values were smaller than the uncertainty values determined by the Physikalisch-Technische Bundesanstalt (PTB) calibration. The extended uncertainty of the measurement results (step height or mean pitch value) was less than 1 nm.

Paper Details

Date Published: 18 June 2007
PDF: 7 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661624 (18 June 2007); doi: 10.1117/12.726230
Show Author Affiliations
N. Dorozhovets, Technische Univ. Ilmenau (Germany)
T. Hausotte, Technische Univ. Ilmenau (Germany)
G. Jäger, Technische Univ. Ilmenau (Germany)
E. Manske, Technische Univ. Ilmenau (Germany)

Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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