
Proceedings Paper
Adopting our heterodyne interferometer with sub-nm sensitivity for industrial position metrologyFormat | Member Price | Non-Member Price |
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Paper Abstract
The laser interferometer space antenna (LISA) mission utilizes as current baseline a high sensitivity optical
readout for measuring the relative position and tilt of a free flying proof mass with respect to the satellite housing.
The required sensitivities are ~5pm/&sqrt;
Hz for the translation measurement and ~20 nrad/&sqrt;Hz for the tilt
measurement. For this purpose, EADS Astrium GmbH - in collaboration with the Humboldt-University Berlin
and the University of Applied Sciences Konstanz - develops a fiber-coupled heterodyne interferometer including
differential wavefront sensing for the tilt measurement. The interferometer is based on a highly symmetric design
where both, measurement and reference beam have the same optical pathlength, frequency and polarization. We
realized a mechanically highly stable and compact setup which is located in a temperature stabilized vacuum
chamber and utilizes frequency stabilization of the laser and intensity stabilization of the heterodyne frequencies
at the fibre outputs. Noise levels below 5 pm/&sqrt;
Hz in translation movement and below 10 nrad/&sqrt;Hz in tilt
movement (both for frequencies above 10-2 Hz) were measured.
While this setup is developed with respect to the requirements of the LISA space mission, it also has potential
applications beyond: In industry, high precision position measurements - with ever increasing sensitivity - are
needed e.g. for guaranteeing very small tolerances for automobile industry components. While current systems
developed for this purpose use for instance whitelight-interferometry with resulting sensitivities in the nm-range,
our interferometer opens the possibility to further improve the sensitivity. Here, we discuss possible
implementations of our interferometer for industrial applications.
Paper Details
Date Published: 18 June 2007
PDF: 6 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661649 (18 June 2007); doi: 10.1117/12.726180
Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)
PDF: 6 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661649 (18 June 2007); doi: 10.1117/12.726180
Show Author Affiliations
Thilo Schuldt, Humboldt-Univ. zu Berlin (Germany)
Hochschule für Technik, Wirtschaft und Gestaltung (Germany)
Martin Gohlke, Humboldt-Univ. zu Berlin (Germany)
EADS Astrium GmbH (Germany)
Dennis Weise, EADS Astrium GmbH (Germany)
Hochschule für Technik, Wirtschaft und Gestaltung (Germany)
Martin Gohlke, Humboldt-Univ. zu Berlin (Germany)
EADS Astrium GmbH (Germany)
Dennis Weise, EADS Astrium GmbH (Germany)
Achim Peters, Humboldt-Univ. zu Berlin (Germany)
Ulrich Johann, EADS Astrium GmbH (Germany)
Claus Braxmaier, Hochschule für Technik, Wirtschaft und Gestaltung (Germany)
EADS Astrium GmbH (Germany)
Ulrich Johann, EADS Astrium GmbH (Germany)
Claus Braxmaier, Hochschule für Technik, Wirtschaft und Gestaltung (Germany)
EADS Astrium GmbH (Germany)
Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)
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