Proceedings Paper
Dispersive white light interferometry for 3D inspection of thin film layers of flat panel displays| Format | Member Price | Non-Member Price |
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Paper Abstract
Emerging possibility of applying white-light interferometry to the area of thin-film metrology is addressed. Emphasis is
given to explaining underlying spectrally-resolved interferometric principles of white-light interferometry for measuring
the top surface profile as well as the thickness of thin-film layers, which enables one to reconstruct the complete 3-D
tomographical view of the target surface coated with thin-film layers. Actual measurement results demonstrate that
white-light interferometry in either scanning or dispersive scheme is found well suited for high speed 3-D inspection of
dielectric thin-film layers deposited on semiconductor or glass substrates.
Paper Details
Date Published: 18 June 2007
PDF: 8 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66160T (18 June 2007); doi: 10.1117/12.726040
Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)
PDF: 8 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66160T (18 June 2007); doi: 10.1117/12.726040
Show Author Affiliations
Young-Sik Ghim, Korea Advanced Institute of Science and Technology (South Korea)
Joonho You, Korea Advanced Institute of Science and Technology (South Korea)
Joonho You, Korea Advanced Institute of Science and Technology (South Korea)
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)
Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)
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