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Proceedings Paper

Simultaneous phase-shifting interferometry based on high-speed CCD
Author(s): Fen Zuo; Lei Chen; Chunsheng Xu
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Paper Abstract

A new simultaneous phase-shifting measuring method based on Twyman-Green polarization phase- shifting technique is presented. In the corresponding set-up, a 2-dimentional grating is applied. By the grating, 4 diffracted beams of (±1, ±1) orders are formed for the same diffracting efficiency. Each is let to pass one of four polarizing plates respectively, polarization directions of which differ in turn by 45°. So four interferograms with 90°phase-shifting interval are frozen simultaneously by a high-speed CCD, which has short exposure of 1/10000 s. Moreover, by the use of 4-bucket algorithm, a profile of the test surface is thus derived. Meantime, the system is deposited on a vibration-isolate flat, and the structure of an ordinary piezoelectric transducer (PZT), with a time response above 1000 Hz at amplitude of &lgr;/2, is used to simulate an epicenter, the frequency of which varying from 10 Hz to 200 Hz. In addition, the experimental results reveal that the advanced system has a high testing precision and testing repeatability in the vibrational environment whose amplitude- frequency product is less than 100 Wave-Hertz. Therefore, the proposed system has enough endurance to the vibration during on-line optical testing.

Paper Details

Date Published: 17 January 2007
PDF: 7 pages
Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 62795N (17 January 2007); doi: 10.1117/12.725441
Show Author Affiliations
Fen Zuo, Nanjing Univ. of Science and Technology (China)
HuaiYin Teacher's College (China)
Lei Chen, Nanjing Univ. of Science and Technology (China)
Chunsheng Xu, Nanjing Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 6279:
27th International Congress on High-Speed Photography and Photonics
Xun Hou; Wei Zhao; Baoli Yao, Editor(s)

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