
Proceedings Paper
Simulation of the detectors response of an autocollimatorFormat | Member Price | Non-Member Price |
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Paper Abstract
A detection of the lateral position of a test pattern imaged onto a position sensitive detector is quite
commonly used in a variety of different measurement applications. In the case of an electronic autocollimator,
the position of the image of a reticle is determined to measure small angle changes of a
tilted surface. In many cases CCD matrix or CCD line detectors are used as position sensing devices.
Two different procedures for the detection of the position of the test pattern are compared taking
into account modulations of the obtained image signal, caused by diffraction. Differences between
the detection of the arithmetic mean value and the geometrical mean value of the intensity will be
analyzed. The influence of different fill factors of the detector elements is calculated.
To avoid unwanted modulations of the signal a suitable method or algorithm for the detection of the
position as well as an optimized layout of the reticle has to be chosen. Binary and phase shifting reticle
designs will be compared. It is shown that an optimized layout is able to largely compensate modulations
while the image is laterally shifted in the plane of the detector. Due to a step by step description
of the image formation and signal analysis the example given will be also of practical use.
Paper Details
Date Published: 18 June 2007
PDF: 8 pages
Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 661703 (18 June 2007); doi: 10.1117/12.725428
Published in SPIE Proceedings Vol. 6617:
Modeling Aspects in Optical Metrology
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)
PDF: 8 pages
Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 661703 (18 June 2007); doi: 10.1117/12.725428
Show Author Affiliations
Gerald Fütterer, Physikalisch-Technische Bundesanstalt (Germany)
Published in SPIE Proceedings Vol. 6617:
Modeling Aspects in Optical Metrology
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)
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