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Proceedings Paper

On-axis, non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy
Author(s): Rainer Wilhelm; Alain Courteville; Fabrice Garcia; François de Vecchi
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Paper Abstract

This technical summary presents the fiber-optics interferometric sensor LISE and its applications in the optics industry. The summary explains the measurement principle (Section 1), describes the hardware system components (Section 2) and gives results of an experimental accuracy validation (Section 3). Section 4 illustrates the application of the sensor as a metrology tool for optics manufacturing.

Paper Details

Date Published: 14 May 2007
PDF: 4 pages
Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160X (14 May 2007); doi: 10.1117/12.723546
Show Author Affiliations
Rainer Wilhelm, FOGALE nanotech (France)
Alain Courteville, FOGALE nanotech (France)
Fabrice Garcia, FOGALE nanotech (France)
François de Vecchi, FOGALE nanotech (France)

Published in SPIE Proceedings Vol. 10316:
Optifab 2007: Technical Digest
James J. Kumler; Matthias Pfaff, Editor(s)

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