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Proceedings Paper

An optical microsystem based on vertical silicon-air Bragg mirror for liquid substances monitoring
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Paper Abstract

In this work, an integrated optical microsystems for the continuous detection of flammable liquids has been fabricated and characterized. The proposed system is composed of a the transducer element, which is a vertical silicon/air Bragg mirror fabricated by silicon electrochemical micromachining, sealed with a cover glass anodically bonded on its top. The device has been optically characterized in presence of liquid substances of environmental interest, such as ethanol and isopropanol. The preliminary experimental results are in good agreement with the theoretical calculations and show the possibility to use the device as an optical sensor based on the change of its reflectivity spectrum.

Paper Details

Date Published: 16 May 2007
PDF: 5 pages
Proc. SPIE 6585, Optical Sensing Technology and Applications, 65850N (16 May 2007); doi: 10.1117/12.722376
Show Author Affiliations
Luca De Stefano, IMM-CNR (Italy)
Ivo Rendina, IMM-CNR (Italy)
Ilaria Rea, IMM-CNR (Italy)
Federico II Univ. of Naples (Italy)
Lucia Rotiroti, IMM-CNR (Italy)
Federico II Univ. of Naples (Italy)
Edoardo De Tommasi, IMM-CNR (Italy)
Giuseppe Barillaro, Univ. of Pisa (Italy)

Published in SPIE Proceedings Vol. 6585:
Optical Sensing Technology and Applications
Francesco Baldini; Jiri Homola; Robert A. Lieberman; Miroslav Miler, Editor(s)

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