Proceedings Paper
Silicon cantilever sensor for micro-/nanoscale dimension and force metrology| Format | Member Price | Non-Member Price |
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Paper Abstract
A piezoresistive silicon cantilever-type tactile sensor was described as well as its application for dimensional metrology
with micro components and as a transferable force standard in the micro-to-nano Newton range. As an example for
tactile probing metrology the novel cantilever sensor was used for surface scanning with calibrated groove and
roughness artifacts. Force metrology was addressed based on calibration procedures which were developed for
commercial stylus instruments as well as for glass pipettes designed for the characterization of the vital forces of isolated
cells.
Paper Details
Date Published: 15 May 2007
PDF: 8 pages
Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890M (15 May 2007); doi: 10.1117/12.721951
Published in SPIE Proceedings Vol. 6589:
Smart Sensors, Actuators, and MEMS III
Thomas Becker; Carles Cané; N. Scott Barker, Editor(s)
PDF: 8 pages
Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890M (15 May 2007); doi: 10.1117/12.721951
Show Author Affiliations
Erwin Peiner, Technical Univ. Carolo-Wilhelmina at Braunschweig (Germany)
Lutz Doering, Physikalisch-Technische Bundesanstalt (Germany)
Lutz Doering, Physikalisch-Technische Bundesanstalt (Germany)
Michael Balke, Technical Univ. Carolo-Wilhelmina at Braunschweig (Germany)
Andreas Christ, Martin Luther Univ. Halle-Wittenberg (Germany)
Andreas Christ, Martin Luther Univ. Halle-Wittenberg (Germany)
Published in SPIE Proceedings Vol. 6589:
Smart Sensors, Actuators, and MEMS III
Thomas Becker; Carles Cané; N. Scott Barker, Editor(s)
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