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Proceedings Paper

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology
Author(s): Erwin Peiner; Lutz Doering; Michael Balke; Andreas Christ
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Paper Abstract

A piezoresistive silicon cantilever-type tactile sensor was described as well as its application for dimensional metrology with micro components and as a transferable force standard in the micro-to-nano Newton range. As an example for tactile probing metrology the novel cantilever sensor was used for surface scanning with calibrated groove and roughness artifacts. Force metrology was addressed based on calibration procedures which were developed for commercial stylus instruments as well as for glass pipettes designed for the characterization of the vital forces of isolated cells.

Paper Details

Date Published: 15 May 2007
PDF: 8 pages
Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890M (15 May 2007); doi: 10.1117/12.721951
Show Author Affiliations
Erwin Peiner, Technical Univ. Carolo-Wilhelmina at Braunschweig (Germany)
Lutz Doering, Physikalisch-Technische Bundesanstalt (Germany)
Michael Balke, Technical Univ. Carolo-Wilhelmina at Braunschweig (Germany)
Andreas Christ, Martin Luther Univ. Halle-Wittenberg (Germany)

Published in SPIE Proceedings Vol. 6589:
Smart Sensors, Actuators, and MEMS III
Thomas Becker; Carles Cané; N. Scott Barker, Editor(s)

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