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Proceedings Paper

Glucose oxidase characterization for the fabrication of hybrid microelectronic devices
Author(s): Manuela Fichera; Sebania Libertino; Venera Aiello; Antonino Scandurra; Fulvia Sinatra; Marcella Renis; Salvatore Lombardo
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Paper Abstract

We studied the enzyme glucose oxidase (GOx) immobilization on silicon oxide surfaces. In particular, we optimized the immobilization protocol and verified that it fulfills both requirements of enzyme preservation (measured by enzymatic activity) and VLSI compatibility. The immobilization consists of four steps: oxide activation, silanization, linker molecule deposition and GOx immobilization. It is crucial to form an uniform linker layer on the sample surface in order to maximize the sites available for enzyme bonding and achieving the best enzyme deposition. In this study, utilizing glutaraldehyde as bifunctional reagent, we monitored its uniformity on the surface through X-ray Photoelectron Spectroscopy (XPS). Once optimized, the same protocol was used to anchor the enzyme in a porous silicon dioxide matrix. Gold labeled GOx molecules were monitored by electron diffraction X-ray (EDX) measurements coupled with scanning electron microscopy (SEM). The enzymatic activity was also monitored to confirm the goodness of the proposed immobilization method. Finally, the electrical characterization of MOS capacitors, showing a shift of about 1 V in the flat band voltage, demonstrated the possibility to use this approach for electrical detection.

Paper Details

Date Published: 22 May 2007
PDF: 10 pages
Proc. SPIE 6592, Bioengineered and Bioinspired Systems III, 65920T (22 May 2007); doi: 10.1117/12.721862
Show Author Affiliations
Manuela Fichera, CNR-IMM (Italy)
Sebania Libertino, CNR-IMM (Italy)
Venera Aiello, CNR-IMM (Italy)
Univ. degli Studi di Catania (Italy)
Antonino Scandurra, Consorzio Catania Ricerche (Italy)
Fulvia Sinatra, Univ. degli Studi di Catania (Italy)
Marcella Renis, Univ. degli Studi di Catania (Italy)
Salvatore Lombardo, CNR-IMM (Italy)

Published in SPIE Proceedings Vol. 6592:
Bioengineered and Bioinspired Systems III
Paolo Arena; Ángel Rodríguez-Vázquez; Gustavo Liñán-Cembrano, Editor(s)

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