Metal oxide semiconductor gas sensors with modulated working temperature should reveal small thermal time constant in comparison to the time constants of chemical reactions between gas atmosphere and sensitive layer. In such case analyzed sensor response is dominated with specific phenomena originated from these reactions. A way the sensors are mounted has big influence on the sensor thermal time constants. In experiments authors used gas sensors with ceramic and micromachined silicon substrates glued to the case or suspended on thin wires. Although mechanical stability and durability of glued sensors are better, the lower power consumption and lower time constants are possible with sensors mounted using thin wires.

Date Published: 20 October 2006
PDF: 4 pages
Proc. SPIE 6348, Optoelectronic and Electronic Sensors VI, 63480Q (20 October 2006); doi: 10.1117/12.721110

Published in SPIE Proceedings Vol. 6348:
Optoelectronic and Electronic Sensors VI
Tadeusz Pisarkiewicz, Editor(s)