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Proceedings Paper

M(O)EMS-based integrated micro-interferometric system
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Paper Abstract

In the paper idea of integrated waveguide micro-interferometric system is presented. Results of numerical simulation of beam propagation (geometrical and wave depiction) in the measurement interferometric module is presented. Article also briefly presents laboratory setups, which are used to model the interferometers.

Paper Details

Date Published: 20 October 2006
PDF: 4 pages
Proc. SPIE 6348, Optoelectronic and Electronic Sensors VI, 63480M (20 October 2006); doi: 10.1117/12.721029
Show Author Affiliations
Jerzy Krezel, Warsaw Technical Univ. (Poland)
Leszek Salbut, Warsaw Technical Univ. (Poland)
Małgorzata Kujawinska, Warsaw Technical Univ. (Poland)

Published in SPIE Proceedings Vol. 6348:
Optoelectronic and Electronic Sensors VI
Tadeusz Pisarkiewicz, Editor(s)

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