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Proceedings Paper

Interferometric measurement of rotationally symmetric aspheric surfaces
Author(s): Michael F. Kuechel
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Paper Abstract

A new method for measuring the surface of aspheric optics using a combination of two interferometric technologies is presented. The metrology method provides a 3D measurement with high data density in a short measurement time without the need for special tooling. The measurement technique is inherently insensitive to ray trace error and can be used on the shop floor. It covers a large range of aspheric departures and delivers very small measurement uncertainties.

Paper Details

Date Published: 14 May 2007
PDF: 4 pages
Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160Q (14 May 2007); doi: 10.1117/12.720726
Show Author Affiliations
Michael F. Kuechel, Zygo Corp. (Germany)

Published in SPIE Proceedings Vol. 10316:
Optifab 2007: Technical Digest
James J. Kumler; Matthias Pfaff, Editor(s)

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