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Proceedings Paper

Surface and thickness metrology using scanning low-coherence dual interferometry (SLCDI)
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Paper Abstract

We present experimental results for a low-coherence, dual-wavelength metrology system capable of measuring simultaneously both optical thickness and surface figure. The system measures optical thicknesses as thin as 12 microns to as wide as 12 mm with an accuracy of 0.1 microns. The current system scans at a resolution of 50 microns, which is limited by the spot-size of the measurement beam. We validate that SLCDI yields results in agreement with traditional interferometry and demonstrate its ability to measure aspheric “saddle” mirrors and complex three-dimensional surfaces.

Paper Details

Date Published: 14 May 2007
PDF: 4 pages
Proc. SPIE 10316, Optifab 2007: Technical Digest, 103161Z (14 May 2007); doi: 10.1117/12.718724
Show Author Affiliations
Christopher J. Ditchman, ASE Optics, Inc. (United States)
Christopher Cotton, ASE Optics, Inc. (United States)
Damon W. Diehl, ASE Optics, Inc. (United States)

Published in SPIE Proceedings Vol. 10316:
Optifab 2007: Technical Digest
James J. Kumler; Matthias Pfaff, Editor(s)

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