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Proceedings Paper

Software tools for studying optical manufacturability with modern monochromatic monitoring devices
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Paper Abstract

The success of fabrication of optical coatings depends on a proper choice of a theoretical coating design and on the choice of monitoring strategy that provides low thickness errors for the chosen design. Software tools described in this presentation help an optical coating engineer to investigate a potential manufacturability of a given theoretical design when various monochromatic monitoring strategies are applied. This may help to reduce or even eliminate test deposition runs required for a successful coating fabrication.

Paper Details

Date Published: 14 May 2007
PDF: 4 pages
Proc. SPIE 10316, Optifab 2007: Technical Digest, 103161K (14 May 2007); doi: 10.1117/12.718119
Show Author Affiliations
Alexander Tikhonravov, Moscow State Univ. (Russia)
Michael Trubetskov, Moscow State Univ. (Russia)
Jennifer Kruschwitz, JK Consulting (United States)
Alfons Zoller, Leybold Optics GmbH (Germany)
Harro Hagedorn, Leybold Optics GmbH (Germany)
Boris Romanov, Leybold Optics GmbH (Germany)
Michael Boos, Leybold Optics GmbH (Germany)

Published in SPIE Proceedings Vol. 10316:
Optifab 2007: Technical Digest
James J. Kumler; Matthias Pfaff, Editor(s)

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