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Proceedings Paper

Study on a high precision piezoelectric resonators quartz crystal temperature sensor by means of three dimensional finite element method
Author(s): Hong Ai; Xin Li; Bo You; Haiying Wang; Jun Xu
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Paper Abstract

A new type of piezoelectric resonance quartz crystal temperature sensors which exhibits a high precision and a good stability has been developed. A Y-cut (4.05°) quartz resonator operating on low-frequency thickness C-mode was chosen as the temperature sensor because of its availability and its good linear frequency versus temperature characteristic. In order to reduce the mounting effects and to decouple interfering modes of motion, the contour structures of the quartz wafers having a biconvex type and bat metallic electrodes with the sine ripple on the surfaces of the quartz wafer are used. The resonance frequency was analyzed by three-dimensional Finite Element Method and the results are compared with the theoretical values whenever they are available. Using low-cost oscillators connected to a microcontroller, a precise measurement system of temperature is implemented. Experimentally, the accuracy of measurement is better than 0.05 degree C (The errors include non-linearity, reproducibility and influence of load temperature) over the temperature range -60 degree C to 200 degree C.

Paper Details

Date Published: 13 October 2006
PDF: 7 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62801A (13 October 2006); doi: 10.1117/12.716133
Show Author Affiliations
Hong Ai, Harbin Univ. of Science and Technology (China)
Xin Li, Harbin Univ. of Science and Technology (China)
Bo You, Harbin Univ. of Science and Technology (China)
Haiying Wang, Harbin Univ. of Science and Technology (China)
Jun Xu, Harbin Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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