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Proceedings Paper

A linear diffraction grating interferometer with high accuracy
Author(s): Kuang-Chao Fan; Yu-Sheng Liu; Ye-Jin Chen; Fang Cheng
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Paper Abstract

A new miniature nanometer interferometer using grating Doppler effect is developed. The principle of this interferometer can be attributed to the phase information encoded by the ±1st order diffractive light beams. Properly interfering these two light beams leads to modulation similar to Doppler frequency shift, which can be translated to displacement measurement via phase decoding. Because of the measurement standard of grating interferometer system is the grating pitch, compared to the commonly used laser interferometer, the diffractive grating system reduces the environment influences on measurement accuracy. The calibration experiment between grating and HP5529A has been implemented. The measurement results show this grating interferometer measurement system is applicable for higher accuracy in long stroke.

Paper Details

Date Published: 13 October 2006
PDF: 6 pages
Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628008 (13 October 2006); doi: 10.1117/12.715260
Show Author Affiliations
Kuang-Chao Fan, Hefei Univ. of Technology (China)
National Taiwan Univ. (Taiwan)
Yu-Sheng Liu, Hefei Univ. of Technology (China)
Ye-Jin Chen, Hefei Univ. of Technology (China)
Fang Cheng, Hefei Univ. of Technology (China)

Published in SPIE Proceedings Vol. 6280:
Third International Symposium on Precision Mechanical Measurements
Kuang-Chao Fan; Wei Gao; Xiaofen Yu; Wenhao Huang; Penghao Hu, Editor(s)

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