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Proceedings Paper

Surface acoustic wave devices
Author(s): C. Müller; A. Nateprov; G. Obermeier; M. Klemm; V. Tsurkan; A. Wixforth; R. Tidecks; S. Horn
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Paper Abstract

Starting with an introduction to surface acoustic waves, their generation and detection using interdigital transducers (IDTs) on piezoelectric materials (e.g. LiNbO3 and ZnO) will be reviewed. Then the application of surface acoustic waves in electronic devices will be presented. Moreover, recent studies, using the technique of attaching the material of investigation onto the sound path of the acoustic delay line between the IDTs is discussed.

Paper Details

Date Published: 20 February 2007
PDF: 13 pages
Proc. SPIE 6474, Zinc Oxide Materials and Devices II, 647415 (20 February 2007); doi: 10.1117/12.714700
Show Author Affiliations
C. Müller, Univ. Augsburg (Germany)
A. Nateprov, Univ. Augsburg (Germany)
G. Obermeier, Univ. Augsburg (Germany)
M. Klemm, Univ. Augsburg (Germany)
V. Tsurkan, Univ. Augsburg (Germany)
A. Wixforth, Univ. Augsburg (Germany)
R. Tidecks, Univ. Augsburg (Germany)
S. Horn, Univ. Augsburg (Germany)

Published in SPIE Proceedings Vol. 6474:
Zinc Oxide Materials and Devices II
Ferechteh Hosseini Teherani; Cole W. Litton, Editor(s)

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