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Proceedings Paper

Hardware verification of litho-friendly design (LfD) methodologies
Author(s): Reinhard März; Kai Peter; Sonja Gröndahl; Klaus Keiner; Byoung Il Choi; Shyue Fong Quek; Mei Chun Yeo; Nan Shu Chen; Soo Muay Goh
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Paper Abstract

With the upcoming technology generations, it will become more and more challenging to provide a good yield and a fast yield ramp. The contribution of Resolution Enhancement Technologies (RET) to Design for Manufacturability (DfM) targets is to provide a good printability over the whole process window and the control by print image simulation (PW-ORC) and to identify and remove yield issues imprinted in the drawn layout in early phases of the design flow. Such a lithography-aware design data flow, which we call LfD (Litho-friendly Design) will be a very important step towards a fully developed DfM environment. We report in this paper the application of a LfD design flow used for library cells at the MAPLE, an Infineon 65 nm design prototype fabricated by Chartered. The results of the process variability analysis are verified by experimental results (dose-focus exposure matrices).

Paper Details

Date Published: 21 March 2007
PDF: 9 pages
Proc. SPIE 6521, Design for Manufacturability through Design-Process Integration, 65210M (21 March 2007); doi: 10.1117/12.713995
Show Author Affiliations
Reinhard März, Infineon Technologies AG (Germany)
Kai Peter, Infineon Technologies AG (Germany)
Sonja Gröndahl, Infineon Technologies AG (Germany)
Klaus Keiner, Infineon Technologies AG (Germany)
Byoung Il Choi, Chartered Semiconductor Manufacturing, Ltd. (Singapore)
Shyue Fong Quek, Chartered Semiconductor Manufacturing, Ltd. (Singapore)
Mei Chun Yeo, Chartered Semiconductor Manufacturing, Ltd. (Singapore)
Nan Shu Chen, Chartered Semiconductor Manufacturing, Ltd. (Singapore)
Soo Muay Goh, Chartered Semiconductor Manufacturing, Ltd. (Singapore)

Published in SPIE Proceedings Vol. 6521:
Design for Manufacturability through Design-Process Integration
Alfred K.K. Wong; Vivek K. Singh, Editor(s)

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