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Proceedings Paper

Beyond measurement uncertainty: improving the productivity of metrology tools through recipe error analysis
Author(s): Eric Solecky; Anas Bennasser; Erwin Weissmann
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Paper Abstract

A key responsibility of a metrology engineer is to reduce measurement uncertainty. While important, decreasing measurement uncertainty is only one of many tasks the metrology engineer needs to address. A broader view includes continually improving the productivity of the metrology toolset. This requires the appropriate skills, methods and analysis tools to identify and address the key issues efficiently. Often, limitations in recipe build experience, inadequate calibrations and monitoring of the fleet and toolset limitations, cause many productivity issues that directly affect the cycle-time, toolset throughput, and the efficient use of engineering resources. This paper explores the analysis tools needed to improve productivity by analyzing metrology toolset recipe errors. Examples of methods and an application developed and used by IBM will be shown along with how they have lead to improved productivity of the fleet. Further, a discussion is included catered towards standardizing the critical information needed from suppliers for building universal analysis tools to allow improvements in productivity.

Paper Details

Date Published: 5 April 2007
PDF: 13 pages
Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65181J (5 April 2007);
Show Author Affiliations
Eric Solecky, IBM Systems and Technology Group (United States)
Anas Bennasser, IBM Systems and Technology Group (United States)
Erwin Weissmann, IBM Systems and Technology Group (United States)

Published in SPIE Proceedings Vol. 6518:
Metrology, Inspection, and Process Control for Microlithography XXI
Chas N. Archie, Editor(s)

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