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Proceedings Paper

Stretched polymer nanohairs by nanodrawing
Author(s): Hoon Eui Jeong; Sung Hoon Lee; Pilnam Kim; Kahp Y. Suh
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Paper Abstract

We present a simple method for fabricating high aspect-ratio polymer nanostructures on a solid substrate by sequential application of molding and drawing of a thin polymer film. In this method, a thin polymer film is prepared by spin coating on a solid substrate and the temperature is raised above the polymer's glass transition while in conformal contact with a poly(urethane acrylate) (PUA) mold having nano-cavities. Consequently, capillary force induces deformation of the polymer melt into the void spaces of the mold and the filled nanostructure was further elongated upon removal of the mold due to tailored adhesive force at the mold/polymer interface. The optimum value of the work of adhesion at the mold/polymer interface ranged from 0.9 to 1.1 times that at the substrate/polymer interface. Below or above this range, a simple molding or detachment occurred, corresponding to earlier findings.

Paper Details

Date Published: 15 March 2007
PDF: 7 pages
Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65171K (15 March 2007); doi: 10.1117/12.712790
Show Author Affiliations
Hoon Eui Jeong, Seoul National Univ. (South Korea)
Sung Hoon Lee, Seoul National Univ. (South Korea)
Pilnam Kim, Seoul National Univ. (South Korea)
Kahp Y. Suh, Seoul National Univ. (South Korea)

Published in SPIE Proceedings Vol. 6517:
Emerging Lithographic Technologies XI
Michael J. Lercel, Editor(s)

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