This paper reports on the development of micromachined pillar arrays for the filtering of terahertz radiation. These pillar arrays are fabricated using ultraviolet based processing of thick SU8. This micromachining technique enables the array patterns, dimensions, and consequently the filter characteristics, to be readily defined. In particular, we demonstrate that by combining individual filter arrays with either different periods or pillar diameters we can isolate individual pass bands in the 1 to 2 THz region.

Date Published: 1 February 2007
PDF: 8 pages
Proc. SPIE 6472, Terahertz and Gigahertz Electronics and Photonics VI, 647206 (1 February 2007); doi: 10.1117/12.712716

Published in SPIE Proceedings Vol. 6472:
Terahertz and Gigahertz Electronics and Photonics VI
Kurt J. Linden; Laurence P. Sadwick, Editor(s)