Proceedings Paper
CD measurement in flash memory using substrate current technology| Format | Member Price | Non-Member Price |
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Paper Abstract
We analyzed substrate current signal of flash memory with floating and control gates using EB-Scope for the
measurement of bottom CD. We showed that the signals come from capacitance structure of the floating and control
gates. From this analysis, we showed we can get the information of electrical characteristics of floating and control
gates such as capacitance, resistance and time constant as well as the bottom CD of flash memory with floating and
control gates. This technique form this analysis can contribute yield enhancement in flash memory manufacturing
process by in-situ monitoring.
Paper Details
Date Published: 6 April 2007
PDF: 8 pages
Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65182T (6 April 2007);
Published in SPIE Proceedings Vol. 6518:
Metrology, Inspection, and Process Control for Microlithography XXI
Chas N. Archie, Editor(s)
PDF: 8 pages
Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65182T (6 April 2007);
Show Author Affiliations
Takeo Ushiki, Fab Solutions, Inc. (Japan)
Published in SPIE Proceedings Vol. 6518:
Metrology, Inspection, and Process Control for Microlithography XXI
Chas N. Archie, Editor(s)
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