
Proceedings Paper
Advances in compute hardware platforms for computational lithographyFormat | Member Price | Non-Member Price |
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Paper Abstract
The last six years have seen the increasing advance of computational and algorithmic complexity to compute mask
patterns that retain sufficient lithographic fidelity to print and yield well enough to maintain the advances in circuit
density that are the engine of the semiconductor economy. New Computational Lithography techniques such as Optical
Proximity Correction (OPC), Scattering Bars (SB), Phase Shift Masks (PSM), and Lithography Verification (LV)
constitute a significant transformation of the design. Initially applied only to the most critical portions of the most
critical layers such as gate poly and active, they are now considered de-rigueur for almost every layer through and
including the topmost metal layers. These new Computational Lithography applications have become one of the most
computationally demanding steps in the design process. Compute farms of hundreds and even thousands of CPUs are
now routinely used to run these applications. This paper will examine the evolution of these techniques and the
computing systems to run them. A variant of Amdahl's law and an example COO equation to compute cost of
ownership for the hardware platforms are developed. The practical aspects of the infrastructure needed to support such
extensive compute farms including power, support, and cooling will be examined. Newly emerging High Performance
Computing (HPC) techniques that hold the promise of checking this unbridled growth in computational requirements
will be reviewed and contrasted including multi-core processors, Field Programmable Gate Arrays (FPGAs), The Cell
Broadband Engine (CBE), Digital Signal Processors (DSPs), and Graphics Processing Units (GPUs) will be considered.
Paper Details
Date Published: 27 March 2007
PDF: 16 pages
Proc. SPIE 6520, Optical Microlithography XX, 652018 (27 March 2007); doi: 10.1117/12.712397
Published in SPIE Proceedings Vol. 6520:
Optical Microlithography XX
Donis G. Flagello, Editor(s)
PDF: 16 pages
Proc. SPIE 6520, Optical Microlithography XX, 652018 (27 March 2007); doi: 10.1117/12.712397
Show Author Affiliations
Tom Kingsley, Mentor Graphics Corp. (United States)
John Sturtevant, Mentor Graphics Corp. (United States)
John Sturtevant, Mentor Graphics Corp. (United States)
Steve McPherson, Mercury Computer Corp., Inc. (United States)
Matt Sexton, Mercury Computer Corp., Inc. (United States)
Matt Sexton, Mercury Computer Corp., Inc. (United States)
Published in SPIE Proceedings Vol. 6520:
Optical Microlithography XX
Donis G. Flagello, Editor(s)
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