
Proceedings Paper
Real-time VT5 model coverage calculations during OPC simulationsFormat | Member Price | Non-Member Price |
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Paper Abstract
For a robust OPC solution, it is important to isolate and characterize the detractors from high quality printability.
Failure in correctly rendering the design intent in silicon can have multiple causes. Model inability in predicting
lithographic and process implications is one of them. Process model accuracy is highly dependant on the quality of data
used in the calibration phase of the model. Structures encountered during the OPC simulation that have not been
included in the calibration patterns, or even structures somewhat similar to those used in calibration, are some times
incorrectly predicted. In this paper a new method for studying VT5 model coverage during OPC simulations is
investigated. The aerial image parameters for a large number of test structures used for model calibration are first
calculated. A novel sorting and data indexing algorithm is then applied to classify the computed data into fast accessible
look-up tables. These tables are loaded in the beginning of a new OPC simulation where they are used as a reference for
comparing aerial image parameters calculated for new design fragments. Such new approach enables real time
classification of design fragments based on how well covered they are by the VT5 model. Employing this method
avoids catastrophic misses in the correction phase and allows for a robust approach to MBOPC.
Paper Details
Date Published: 21 March 2007
PDF: 9 pages
Proc. SPIE 6521, Design for Manufacturability through Design-Process Integration, 65211R (21 March 2007); doi: 10.1117/12.712394
Published in SPIE Proceedings Vol. 6521:
Design for Manufacturability through Design-Process Integration
Alfred K.K. Wong; Vivek K. Singh, Editor(s)
PDF: 9 pages
Proc. SPIE 6521, Design for Manufacturability through Design-Process Integration, 65211R (21 March 2007); doi: 10.1117/12.712394
Show Author Affiliations
Published in SPIE Proceedings Vol. 6521:
Design for Manufacturability through Design-Process Integration
Alfred K.K. Wong; Vivek K. Singh, Editor(s)
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