Proceedings Paper
Mueller polarimetry in the back focal plane| Format | Member Price | Non-Member Price |
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Paper Abstract
A new Mueller polarimeter based on liquid crystals and a microscope objective is presented, for the characterization of
diffraction gratings in a conical diffraction mounting. Fast measurements of complete Mueller matrices over a range of
polar angles (0-56°) and azimuthal angles (0-360°) are achieved without mechanical movements. The polarization state
generator and analyzer make use of nematic variable retarders. The angular range is achieved through focalization of
light over the measured sample with a microscope objective with a high numerical aperture and imaging of the objective
back Fourier plane on a CCD. Results on isotropic samples and diffraction gratings are shown.
Paper Details
Date Published: 5 April 2007
PDF: 10 pages
Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65180X (5 April 2007); doi: 10.1117/12.708627
Published in SPIE Proceedings Vol. 6518:
Metrology, Inspection, and Process Control for Microlithography XXI
Chas N. Archie, Editor(s)
PDF: 10 pages
Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65180X (5 April 2007); doi: 10.1117/12.708627
Show Author Affiliations
A. De Martino, LPICM-CNRS, Ecole Polytechnique (France)
S. Ben Hatit, LPICM-CNRS, Ecole Polytechnique (France)
S. Ben Hatit, LPICM-CNRS, Ecole Polytechnique (France)
M. Foldyna, LPICM-CNRS, Ecole Polytechnique (France)
Published in SPIE Proceedings Vol. 6518:
Metrology, Inspection, and Process Control for Microlithography XXI
Chas N. Archie, Editor(s)
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