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Proceedings Paper

Mueller polarimetry in the back focal plane
Author(s): A. De Martino; S. Ben Hatit; M. Foldyna
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Paper Abstract

A new Mueller polarimeter based on liquid crystals and a microscope objective is presented, for the characterization of diffraction gratings in a conical diffraction mounting. Fast measurements of complete Mueller matrices over a range of polar angles (0-56°) and azimuthal angles (0-360°) are achieved without mechanical movements. The polarization state generator and analyzer make use of nematic variable retarders. The angular range is achieved through focalization of light over the measured sample with a microscope objective with a high numerical aperture and imaging of the objective back Fourier plane on a CCD. Results on isotropic samples and diffraction gratings are shown.

Paper Details

Date Published: 5 April 2007
PDF: 10 pages
Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65180X (5 April 2007); doi: 10.1117/12.708627
Show Author Affiliations
A. De Martino, LPICM-CNRS, Ecole Polytechnique (France)
S. Ben Hatit, LPICM-CNRS, Ecole Polytechnique (France)
M. Foldyna, LPICM-CNRS, Ecole Polytechnique (France)

Published in SPIE Proceedings Vol. 6518:
Metrology, Inspection, and Process Control for Microlithography XXI
Chas N. Archie, Editor(s)

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