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Proceedings Paper

Formation of silicon structures in silicate glass by femtosecond laser
Author(s): Y. Shimotsuma; K. Miura; M. Sakakura; S. Kanehira; K. Hirao
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Paper Abstract

Femtosecond laser has been widely used in a light source for materials processing when high accuracy and small structure size are required. When a transparent material e.g. glass is irradiated by a tightly focused femtosecond laser, the photo-induced reaction is expected to occur only near the focused part of the laser beam inside the glass due to the multiphoton processes based on the ultrashort interaction time and the ultrahigh light intensity. We proposed a research idea of "induced structure" which means spatially modified micro- and nanostructures in a transparent material by the femtosecond laser irradiation. In this paper, we review our recent investigations on the three-dimensional nanostructure self-organization composed of oxygen deficiencies inside fused silica, the space-selective silicon structures formation in silicate glass based on thermite reaction triggered by femtosecond laser pulses, and diffusion of elements constituting glass based on thermal accumulation by high repetition rate femtosecond laser pulses. We also discuss the mechanisms and possible applications of the observed phenomena.

Paper Details

Date Published: 13 March 2007
PDF: 16 pages
Proc. SPIE 6458, Photon Processing in Microelectronics and Photonics VI, 64580L (13 March 2007); doi: 10.1117/12.707579
Show Author Affiliations
Y. Shimotsuma, Kyoto Univ. (Japan)
K. Miura, Kyoto Univ. (Japan)
M. Sakakura, Japan Science and Technology Corp. (Japan)
S. Kanehira, Kyoto Univ. (Japan)
K. Hirao, Kyoto Univ. (Japan)

Published in SPIE Proceedings Vol. 6458:
Photon Processing in Microelectronics and Photonics VI
David B. Geohegan; Craig B. Arnold; Tatsuo Okada; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

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