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Proceedings Paper

Femtosecond laser microfabrication of subwavelength structures in photonics
Author(s): Vladimir Mezentsev; Jovana S. Petrovic; Mykhaylo Dubov; Ian Bennion; Jürgen Dreher; Holger Schmitz; Rainer Grauer
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Paper Abstract

This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.

Paper Details

Date Published: 20 March 2007
PDF: 11 pages
Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590B (20 March 2007); doi: 10.1117/12.705800
Show Author Affiliations
Vladimir Mezentsev, Aston Univ. (United Kingdom)
Jovana S. Petrovic, Aston Univ. (United Kingdom)
Mykhaylo Dubov, Aston Univ. (United Kingdom)
Ian Bennion, Aston Univ. (United Kingdom)
Jürgen Dreher, Ruhr-Univ. Bochum (Germany)
Holger Schmitz, Aston Univ. (United Kingdom)
Ruhr-Univ. Bochum (Germany)
Rainer Grauer, Ruhr-Univ. Bochum (Germany)

Published in SPIE Proceedings Vol. 6459:
Laser-based Micro- and Nanopackaging and Assembly
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Friedrich G. Bachmann; Willem Hoving, Editor(s)

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