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Proceedings Paper

Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique
Author(s): Wen Dai; Wanjun Wang
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Paper Abstract

Comb drive microactuators are widely used in MEMS devices. Most of the comb drives reported in MEMS field are made using fabrication technology with silicon as structural material. Recent development in UV lithography of SU-8 has made it possible to fabricate the ultra high aspect ratio microstrucres with excellent sidewall quality. In this paper, we report a low cost alternative to the silicon based comb drive by using cured SU-8 polymer as structural material. To achieve electrical conductivity in cured SU-8, a new approach to selectively electroless plate metal on high aspect ratio cured SU-8 polymer microstructures is also reported. In this approach, UV light source was used to activate surfaces of the cured SU-8 microstructures. Selective electroless plating of metals on cured SU-8 was achieved by controlling the UV exposure dosage. The technologies for fabrication of comb drive microactuators based on SU-8 polymer as main structural material were sucessfully developed. Preliminary experimental results have proved the feasibility of the microactuator and the fabrication technology.

Paper Details

Date Published: 12 February 2007
PDF: 6 pages
Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640I (12 February 2007); doi: 10.1117/12.705333
Show Author Affiliations
Wen Dai, Louisiana State Univ. (United States)
Wanjun Wang, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 6464:
MEMS/MOEMS Components and Their Applications IV
Srinivas A. Tadigadapa; Reza Ghodssi; Albert K. Henning, Editor(s)

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