Share Email Print

Proceedings Paper

Holographic femtosecond laser processing by use of a spatial light modulator
Author(s): Satoshi Hasegawa; Yoshio Hayasaki
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Parallel femtosecond laser processing using a hologram displayed on a spatial light modulator is demonstrated. The use of a spatial light modulator enables to perform an arbitrary and variable patterning. The hologram is multiplexed phase Fresnel lenses (MPFL) is demonstrated. The MPFL has the features of an independent tunablity and three-dimensional parallelism of the diffraction peaks with low computational costs. The MPFL is optimized by changing the center phase and size of each phase Fresnel lens while taking account of the intensity distribution of the irradiated laser pulse and the spatial frequency response of the spatial light modulator. Two-dimensional and three-dimensional parallel processing of glass are demonstrate and the processing performance is analyzed.

Paper Details

Date Published: 13 March 2007
PDF: 9 pages
Proc. SPIE 6458, Photon Processing in Microelectronics and Photonics VI, 645815 (13 March 2007);
Show Author Affiliations
Satoshi Hasegawa, The Univ. of Tokushima (Japan)
Yoshio Hayasaki, The Univ. of Tokushima (Japan)

Published in SPIE Proceedings Vol. 6458:
Photon Processing in Microelectronics and Photonics VI
David B. Geohegan; Craig B. Arnold; Tatsuo Okada; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?