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Proceedings Paper

Optimization of COC hot embossing with soft PDMS tools
Author(s): Kaichang Zhou; Ian Papautsky
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Paper Abstract

In this paper, Taguchi optimization method was used to investigate a COC (cyclic olefin copolymer) hot embossing using soft PDMS (polydimethylsiloxane) tools. Because of the PDMS tool's soft intrinsic nature, replication errors occur due to deformation during the hot embossing. The parameters, which affect on the replication quality, such as temperature, embossing force, and hold time were selected as the control factors. Four level, L16 (45) orthogonal array of Taguchi method was use to develop the optimal process. Height and width of the embossed channels were defined as quality characteristics. The result of the analysis indicated temperature to be the most significant factor that substantially affects replication fidelity. The optimized embossing process with soft PDMS tools can now be used to rapidly replicate microfluidic devices having both small and large features with confidence.

Paper Details

Date Published: 22 January 2007
PDF: 11 pages
Proc. SPIE 6465, Microfluidics, BioMEMS, and Medical Microsystems V, 64650R (22 January 2007); doi: 10.1117/12.701281
Show Author Affiliations
Kaichang Zhou, Univ. of Cincinnati (United States)
Ian Papautsky, Univ. of Cincinnati (United States)

Published in SPIE Proceedings Vol. 6465:
Microfluidics, BioMEMS, and Medical Microsystems V
Ian Papautsky; Wanjun Wang, Editor(s)

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