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Proceedings Paper

Fabrication technology of Si microfluidic devices for microbial cell trapping
Author(s): Ramana Murthy Badam; Liang Zhu; Cheng Yong Teo; Xueli Peh; Hongmiao Ji; Hanhua Feng; Wen-Tso Liu
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Paper Abstract

We report fabrication technology for micro fluidic filter device with fine and high aspect ratio filtration gap using single-mask and CMOS compatible process flow. Advantage of Si based Microfabrication platform technology has been fully exploited by adopting manufacture-able process flow. A novel approach of combining silicon deep reactive ion etch (RIE) capability with subsequent gap-fill engineering enabled achieve wide range of filtration gaps of deep sub-micron size with high aspect ratios of >200. This approach eliminated the need to use high-end lithography techniques in order to achieve deep sub-micron gaps after pattern transfer. Si deep RIE etch process was optimized by applying dual passivation technique which enabled to realize sub-micron gap pillar-type filter structures and large reaction chambers simultaneously using single-mask process. Wide range of filtration gap sizes demonstrated in this work offer versatile applications for fine cell trapping such as protozoa and bacteria. Fluid injection channels for the device were realized through wafer backside Si wet etch processing to complete the filter device chip fabrication.

Paper Details

Date Published: 7 March 2007
PDF: 8 pages
Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620E (7 March 2007); doi: 10.1117/12.698926
Show Author Affiliations
Ramana Murthy Badam, Institute of Microelectronics (Singapore)
Liang Zhu, Institute of Microelectronics (Singapore)
Cheng Yong Teo, Institute of Microelectronics (Singapore)
Xueli Peh, Institute of Microelectronics (Singapore)
Hongmiao Ji, Institute of Microelectronics (Singapore)
Hanhua Feng, Institute of Microelectronics (Singapore)
Wen-Tso Liu, Institute of Microelectronics (Singapore)

Published in SPIE Proceedings Vol. 6462:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Mary-Ann Maher; Thomas J. Suleski; Eric G. Johnson; Harold D. Stewart; Jung-Chih Chiao; Gregory P. Nordin, Editor(s)

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