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Proceedings Paper

Laser-induced formation of photocatalytic TiO2 micro networks on a UV-absorbing glass surface
Author(s): Aiko Narazaki; Yoshizo Kawaguchi; Hiroyuki Niino; Masanori Shojiya; Hirotaka Koyo; Keiji Tsunetomo
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Paper Abstract

Laser-induced formation of functional materials from glasses has a great potential for creation of monolithic and high-performance glass-based devices, such as optical circuit and micro-TAS. We have recently developed a laser-induced formation technique of photocatalytic titanium oxide on a UV-absorbing TiO2-SiO2- based glass surface by excimer laser irradiation under a specific condition, which we term laser-induced superficial phase separation. The laser-induced structure has the shape of micro-cones, growing into micro-sized network after accumulating laser pulses, which we call TiO2 micronetwork. The TiO2 micronetwork exhibited the rutile crystalline phase and photocatalytic ability. Moreover, the crystalline phase can be controlled from the rutile to the anatase by post-treatments. Utilizing this technique, we were able to make a site-selective growth of TiO2 micronetworks: a microwell array and a microchannel modified with the TiO2 network only on the bottom. This flexible formation of photocatalytic TiO2 onto a glass surface without any heat-treatments and/or adhesives opens a new way to develop a monolithic glass device like micro-fluidics with light-catalyzed reactions.

Paper Details

Date Published: 20 March 2007
PDF: 11 pages
Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590Q (20 March 2007); doi: 10.1117/12.698264
Show Author Affiliations
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
Yoshizo Kawaguchi, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)
Masanori Shojiya, Nippon Sheet Glass Co., Ltd. (Japan)
Hirotaka Koyo, Nippon Sheet Glass Co., Ltd. (Japan)
Keiji Tsunetomo, Nippon Sheet Glass Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 6459:
Laser-based Micro- and Nanopackaging and Assembly
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Friedrich G. Bachmann; Willem Hoving, Editor(s)

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